Details
BAM offers the test material EDS-TM002, whose spectrum reacts sensitively to malfunctions of the EDS. All necessary measurements for the functional check of an EDS on a scanning electron microscope according to ISO 15632:2021 "Micorbeam analysis - Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis" can be performed with this single sample. It consists of an approximately 6 µm thick layer containing the elements C, Al, Mn, Cu and Zr on a silicon substrate.
The evaluation of the measurement is in principle possible with the software offered by the spectrometer manufacturers. However, it can be performed easier and faster with the software "EDX Spectrometer Test" offered for the EDS-TM002. The software requires that the detector has a thin film window. It is not applicable for the detectors with beryllium window.
You can find more information here.
When purchasing EDS-TM002 with software: Before delivery, you must sign the license agreement associated with the software. You will receive more information about this in case of an order to your given e-mail address.
